发明名称 |
Protective film and method for preparing same |
摘要 |
A high-quality protective film for a dry film resist is provided. A film of a polyethylene is used as the protective film, the polyethylene being prepared by pressurizing ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. and a reaction pressure of not lower than 167 MPa in the presence of a radical polymerization initiator, or by pressuring ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. in the presence of a radical polymerization initiator while allowing a radical polymerization inhibitor to be present in the reaction system.
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申请公布号 |
US6664346(B2) |
申请公布日期 |
2003.12.16 |
申请号 |
US20000736010 |
申请日期 |
2000.12.13 |
申请人 |
JAPAN POLYOLEFINS CO., LTD. |
发明人 |
TSUTSUMI KATSUAKI;HASHIMOTO ISAO |
分类号 |
G03F7/004;B32B27/32;C08F2/01;C08F2/38;C08F2/42;C08F10/02;C08J5/18;G03C1/053;G03F7/11;(IPC1-7):C08F2/42 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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