发明名称 Protective film and method for preparing same
摘要 A high-quality protective film for a dry film resist is provided. A film of a polyethylene is used as the protective film, the polyethylene being prepared by pressurizing ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. and a reaction pressure of not lower than 167 MPa in the presence of a radical polymerization initiator, or by pressuring ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. in the presence of a radical polymerization initiator while allowing a radical polymerization inhibitor to be present in the reaction system.
申请公布号 US6664346(B2) 申请公布日期 2003.12.16
申请号 US20000736010 申请日期 2000.12.13
申请人 JAPAN POLYOLEFINS CO., LTD. 发明人 TSUTSUMI KATSUAKI;HASHIMOTO ISAO
分类号 G03F7/004;B32B27/32;C08F2/01;C08F2/38;C08F2/42;C08F10/02;C08J5/18;G03C1/053;G03F7/11;(IPC1-7):C08F2/42 主分类号 G03F7/004
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