High performance probe system for testing semiconductor wafers,申请号AU20030237195-传众专利搜索

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发明名称	High performance probe system for testing semiconductor wafers
摘要
申请公布号	AU2003237195(A8)	申请公布日期	2003.12.12
申请号	AU20030237195	申请日期	2003.05.07
申请人	FORMFACTOR, INC.	发明人	CHARLES A. MILLER;MATTHEW E. CHRAFT;CHIH-CHIANG TSENG;ROY J. HENSON
分类号	G01R31/26;G01R1/073;G01R3/00;H01L21/66;(IPC1-7):G01R1/073;G01R31/316	主分类号	G01R31/26
代理机构		代理人
主权项
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