METHOD FOR PRODUCING THIN, PLATE-LIKE ELEMENTS HAVING PLANE-PARALLEL PLANE SURFACES AND A PREDETERMINED THICKNESS

摘要

The invention relates to a method for producing thin, plate-like elements having plane-parallel plane surfaces and a predetermined thickness which are produced by lapping or polishing of at least one of the plane surfaces. According to the invention, at least one piezoelectric reference element having an electromechanical coupling that is sufficiently high to induce its resonance frequency is added to electronically inactive plate-like elements. The resonance frequency of the reference element is determined during lapping or polishing and the thickness of the plate-like elements is concluded from the resonance frequency of the reference element.