| 摘要 |
PURPOSE: A spinner driving simulation method for manufacturing a semiconductor device, a recording medium for recording the same, and a simulator are provided to be capable of obtaining a complete recipe and previously preventing mistake capable of being generated, by carrying out a wafer flow simulation enough. CONSTITUTION: A spinner recipe for manufacturing a semiconductor device, is inputted(10). The inputted recipe is transformed into the delay time of each unit of a spinner for storing data(15). The moving path of a wafer and the staying time of the wafer at each unit, are displayed by using the stored data as a reference(20). Whether the recipe is corrected, or not, is decided by evaluating the appropriateness of the path and the time(25).
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