| 发明名称 |
Wafer alignment device and method |
| 摘要 |
An alignment target structure includes a reflective member and a non-reflective field proximate to the member. The field is configured to enhance identification of the target and/or to enhance contrast between the member and the field. The field may include an absorptive structure and/or a diffractive structure.
|
| 申请公布号 |
US2003227625(A1) |
申请公布日期 |
2003.12.11 |
| 申请号 |
US20020164445 |
申请日期 |
2002.06.06 |
| 申请人 |
HEISLEY DAVE ALAN;BALASINGAM RAVINTHIRAN;WATERFALL GREGORY STEWART;BARCEY RUSSELL EUGENE |
发明人 |
HEISLEY DAVE ALAN;BALASINGAM RAVINTHIRAN;WATERFALL GREGORY STEWART;BARCEY RUSSELL EUGENE |
| 分类号 |
G03F9/00;(IPC1-7):G01B11/00 |
主分类号 |
G03F9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
