Stage-actuators that do not generate fluctuating magnetic fields, and stage devices comprising same

摘要

Stage devices are disclosed having especial utility in certain types of microlithography systems. The stage devices impart controlled motion to a stage or platform without generating fluctuating electromagnetic fields. The stage devices include stage-actuators that do not rely on electromagnetics for operation. Multiple stage-actuators achieve motion of a slider relative to a guide bar. Each stage-actuator includes at least two actuator-portions that collectively provide an "inchworm" walking manner of motion of the slider relative to the guide bar. Each actuator-portion includes a respective pressure-application member. The pressure-application members are selectively actuated so as to engage a respective guide bar in a coordinated manner that serves to "push" the slider along the guide bar. Each actuator-portion includes a respective first piezoelectric element that urges the respective pressure-application member against the guide bar and retracts the pressure-application member from the guide bar, and a respective second piezoelectric element that moves the respective pressure-application member in the longitudinal direction of the guide bar.