发明名称 THREE-DIMENSIONAL STRUCTURAL BODY COMPOSED OF SILICON FINE WIRE, ITS MANUFACTURING METHOD, AND DEVICE USING SAME
摘要 <p>A highly-reliable three-dimensional structural body composed of a micro silicon fine wire, a method for manufacturing the three-dimensional structural body, and a device using the same. The three-dimensional structural body comprises a wire (2) of the order of nanometers to micrometers formed by wet-etching using the crystallinity of a single crystal material.</p>
申请公布号 WO2003102549(P1) 申请公布日期 2003.12.11
申请号 JP2003006929 申请日期 2003.06.02
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址
您可能感兴趣的专利