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发明名称
TRATTAMENTO TERMICO RAPIDO CON ARGON/AMMONIACA PER WAFER DI SILICIO WAFER DI SILICIO FABBRICATI IN TALE MODO E CAMERE DI CRESCITA CZOCHRALSK
摘要
申请公布号
ITMI20021248(A1)
申请公布日期
2003.12.09
申请号
IT2002MI01248
申请日期
2002.06.07
申请人
SAMSUNG ELECTRONICS CO LTD.
发明人
PARK JEA-GUN
分类号
H01L
主分类号
H01L
代理机构
代理人
主权项
地址
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