HEATING ELEMENT, HEATING SUBSTRATE, METHOD OF MANUFACTURING HEATING SUBSTRATE, MICROSWITCH AND FLOW SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a heating element and a substrate having good stability and durability, a method for manufacturing them, and an apparatus using them. SOLUTION: A Si substrate 1 made conductive by diffusing impurities such as boron to at least part of it is used as a material for this heating element. An etching process is applied to its heater part 2 provided with one or more slits formed by removing corner parts or by rounding them off, and it is integrated with the silicon substrate 1 to make the heating element. At the same time, a recess provided in its lower part to control the heating condition of the heater part 2 is integrally formed with the substrate. COPYRIGHT: (C)2004,JPO