| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film head terminals which do not generate defective plating, even if they are made small. SOLUTION: The terminals are made by coating a photoresist on a substrate, forming a terminal pattern on the photoresist film, plating the region which is not covered by the photoresist, removing the photoresist, forming a protective film, and exposing the terminals by lapping. Between the developing and plating processes, the surface of the photoresist is RIE-treated in a O2 atmosphere to modify the photoresist surface to improve its wettability to the plating liquid, and air bubbles are eliminated from entangled in the terminal pattern, by decreasing the pressure to prevent defective plating. Thus, pole shaped terminals without defects are obtained. The head can be made small, since the terminals and their spacing can be made small. COPYRIGHT: (C)2004,JPO
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