| 摘要 |
A pressure sensor using an optically powered resonant integrated microstructure (O-RIMS). The pressure sensor comprises a planar substrate (57) having a photodiode, a polysilicon shell (66), a microbeam (61) having a resonant frequency and fastened to the shell (66), and one or more optical fibers. A fluorescent material (58), such as erbium, is placed on the surface of the substrate (57) in proximity to the microbeam (61). A Fabry-Perot cavity is formed comprising the substrate (57), the microbeam (61), and the shell (66). Changes in the vibratory frequency of the microbeam (61) caused by pressure on the shell (66) causes light (50) delivered by an optical fiber to be modulated as the microbeam (61) vibrates. The modulated light (52) is conveyed to a sensor electronics arrangement via the optical fiber. The sensor electronics arrangement determines the pressure surrounding the O-RIMS from the modulated light. |
