| 发明名称 |
VARIABLE SPEED VACUUM PUMP CONTROL METHOD AND APPARATUS |
| 摘要 |
A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals. |
| 申请公布号 |
WO03100259(A1) |
申请公布日期 |
2003.12.04 |
| 申请号 |
WO2003US15030 |
申请日期 |
2003.05.13 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CURRY, MARK, WILLIAM;GREENBANK, DANIEL, PAUL;LU, DANNY, CAM TOAN |
| 分类号 |
F04D19/04;F04D27/02;(IPC1-7):F04D19/04 |
主分类号 |
F04D19/04 |
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