Scanning microscopy method involves sequentially subjecting acousto-optical filter to different control frequencies and detecting separated detection light component depending on control frequency

摘要

The method involves illuminating a specimen (23) with an illumination light beam (5), deflecting detection light from the specimen onto an acousto-optical filter subjected to a control frequency for separating a part of the wavelengths of the detection light beam corresponding to the control frequency, sequentially subjecting the filter to different control frequencies and detecting the separated component depending on the control frequency.