| 发明名称 |
WAFER MAPPING APPARATUS AND METHOD |
| 摘要 |
A wafer mapping system uses a camera to acquire an image of a carrier containing wafers. In one embodiment, the acquired image is stored as rows and columns of pixels. The presence and location of a wafer in the carrier are determined by looking for pixel intensity variations in a column of the image. |
| 申请公布号 |
WO03100725(A1) |
申请公布日期 |
2003.12.04 |
| 申请号 |
WO2000US32769 |
申请日期 |
2000.12.01 |
| 申请人 |
WAFERMASTERS, INCORPORATED |
发明人 |
YOO, WOO, SIK;KANG, KITAEK |
| 分类号 |
G06T1/00;G06T7/00;H01L21/67 |
主分类号 |
G06T1/00 |
| 代理机构 |
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