VAPORIZER, VARIOUS APPARATUSES INCLUDING THE SAME AND METHOD OF VAPORIZATION

摘要

A vaporizer that does not cause clogging or other failure, permits long-term use and enables stable supply of raw materials to a reaction section. In particular, a vaporizer which not only enables continuous and stable supply of raw materials adjusted to stoichiometric ratios but also exerts an effect of reducing the amount of carbon residue in a formed film; and a relevant disperser, film formation unit, method of vaporization, method of dispersion and method of film formation. The vaporizer may be one comprising vaporizing a raw material solution contained in a carrier gas characterized in that means for causing the carrier gas before containing the raw material solution to contain the solvent of the raw material solution is disposed therein.