| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a miniaturized, lightweight and inexpensive nitrogen generation device in which a high purity nitrogen gas product is obtained in a desired amount with a simple construction, and in particular, the obtained product can be used as the carrier gas or makeup gas of an analyzing apparatus, or the oxygen barrier gas in plating or painting treatment by lowering a methane gas concentration in the product. <P>SOLUTION: In this nitrogen generation device, pressurized raw material air is introduced into the adsorption cylinders 13 and 14, and impurities in the raw material air are adsorbed and removed through a molecular sieve active carbon 16 and an adsorbent 15 different from the active carbon 16 in the cylinders 13 and 14. The impurities can be desorbed under a pressure lower than the above adsorption pressure. The active carbon 16 is arranged in the lower layer side of the cylinders 13 and 14, and a molecular sieve zeolite 15 smaller in amount than the active carbon 16 is arranged in the upper layer side thereof. <P>COPYRIGHT: (C)2004,JPO</p> |
