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发明名称
Chemically amplified resist composition
摘要
申请公布号
EP0836119(B1)
申请公布日期
2003.12.03
申请号
EP19970308066
申请日期
1997.10.11
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YOOL, KANG;SANG-JUN, CHOI;DONG-WON, JUNG;CHUN-GEUN, PARK;YOUNG-BUM, KOH
分类号
C08F222/06;C08F220/10;C08F232/00;C08F232/08;C08K5/03;C08K5/375;C08L33/04;C08L35/00;C08L45/00;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/00
主分类号
C08F222/06
代理机构
代理人
主权项
地址
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