| 摘要 |
PROBLEM TO BE SOLVED: To stabilize sensing characteristics and assure reliability for solving the problem of poor reproducibility in mass-producing a pressure distribution sensor, and further enhance productivity and enhance yield in a manufacturing method. SOLUTION: A flow-checking means is provided inside of a sealing agent, and intrusion of the sealing agent into a sensor due to capillary action is inhibited. A distance of a gap between an opposite electrode film and a substrate is optimized to enhance sensing characteristics. Further, a material and a position of a contact and a tension of the opposite electrode film are optimized so as to stabilize characteristics, assure reliability and enhance productivity and yield. COPYRIGHT: (C)2004,JPO
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