| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro temperature sensor using a heat sensitive resistive element material as a material for constituting a sensitive temperature sensor and having a large temperature coefficient of resistance. SOLUTION: The micro temperature sensor is provided with a temperature sensor layer disposed on a tip of a support base and comprising the heat sensitive resistive element material having the large temperature coefficient of resistance, and measures a temperature of a minute region. In the micro temperature sensor, a thermal conduction control layer is provided between the support base and the temperature sensor layer, and the heat sensitive resistive element material covered with a high thermal conduction insulation layer on a sample contact side of the temperature sensor layer is used. COPYRIGHT: (C)2004,JPO
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