| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor having both sufficient resistance to heat and high productivity. SOLUTION: The infrared sensor 20 is provided with a substrate and thermocouples formed on the substrate, and the substrate comprises a diaphragm 4 and a support 2. The thermocouples are constituted of one thermocouple elements 7 made of a membrane mainly made of zinc oxides, and the other thermocouple elements 6 made of a membrane made of a material different from the one thermocouple elements 7. The two types of the thermocouple elements are alternately connected in series. Hot junctions 8 and cold junctions 9 are alternately provided for continuous connecting parts. The hot junctions 8 are arranged on the diaphragm 4, and the cold junctions 9 are arranged on the support 2. COPYRIGHT: (C)2004,JPO
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