| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating furnace capable of heating and treating an object to be heated and treated precisely by a single heating means to achieve uniform temperature distribution. SOLUTION: This heating furnace is provided with a panel heater (heating means) 3 on which the object F to be heated and treated is loaded and which heats the object F to be heated and treated and a heat ray reflecting body 5 provided so as to face the object F to be heated and treated loaded on the panel heater 3 above the panel heater 3. The heat ray reflecting body 5 is constituted in such a way that its thickness is increased from a central part toward a fringe part. COPYRIGHT: (C)2004,JPO
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