| 摘要 |
PURPOSE: An apparatus and a method for inspecting uniformity of a thin film are provided to simply check spatial unevenness of the thin film by using an infrared transmission imaging technique. CONSTITUTION: An apparatus for inspecting uniformity of a thin film includes a controller(1) for controlling intensity of light, a light generating device(2) for generating infrared ray, a light distributing device(3) for distributing light in such a manner that light is uniformly distributed on a sample(4), a camera(5) for collecting infrared ray, which has passed through the sample(4), and a processing device(6) for converting an analog image signal into a digital image signal. A first image is obtained by positioning a substrate at a position corresponding to a sample position. A second image is obtained by positioning the substrate, on which a thin film is deposited, in the position corresponding to the sample position. |
