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发明名称
METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRATES IN CARBON DIOXIDE
摘要
申请公布号
AU2003237814(A1)
申请公布日期
2003.12.02
申请号
AU20030237814
申请日期
2003.05.13
申请人
MICELL TECHNOLOGIES, INC.
发明人
JAMES, B. MCCLAIN;JAMES, P. DEYOUNG;STEPHEN, M. GROSS;MARK, I. WAGNER
分类号
H01L21/308;B08B7/00;C11D7/02;C11D7/08;C11D11/00;H01L21/304;H01L21/311;(IPC1-7):C03C23/00;B08B3/00;C23G1/00;C23G1/02
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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