发明名称 Semiconductor device having quasi-SOI structure
摘要 A semiconductor device having a silicon-on-insulator (SOI) structure includes a lower silicon substrate and an upper silicon pattern electrically insulated from the lower silicon pattern by an isolating insulation layer buried by a reverse T-type hole formed in the lower silicon substrate. A gate insulation layer and a gate electrode are formed over the upper silicon pattern, and source/drain regions are formed in the upper silicon pattern centered around the gate electrode. Also, a channel region is disposed between the source/drain region. A silicon layer or a porous silicon layer is formed under the channel region for electrically connecting the lower silicon substrate and the upper silicon pattern. A body contact, which is the same as that of a general semiconductor device, is thus allowed without a special change in the design of the semiconductor device.
申请公布号 US6657258(B2) 申请公布日期 2003.12.02
申请号 US20020201781 申请日期 2002.07.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE GEUM-JONG
分类号 H01L21/76;H01L21/34;H01L21/762;H01L21/764;H01L27/08;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L27/04;H01L29/06 主分类号 H01L21/76
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