发明名称 Micromachine switch and method of manufacture thereof
摘要 A micromachine switch for use in a millimeter wave circuit and a microwave circuit is simpler in structure than conventional micromachine switches. The micromachine switch has first and second high-frequency signal lines (1b, 1a), cantilever (11) fixed to an end of the first high-frequency signal line (1b) and extending to a position above second high-frequency signal line (1a), first insulating means (15) disposed on second high-frequency signal line (1a), second insulating means (14) disposed in an area where cantilever (11) and second high-frequency signal line (1a) confront each other, and first control signal line (2) connected between an end of second high-frequency signal line (1a) and first insulating means (15), for applying a control signal. When the control signal is applied to second high-frequency signal line (1a), cantilever (11) is attracted to second high-frequency signal line (1a), and connected to second high-frequency signal line (1a) via second insulating means (14) in a high-frequency fashion.
申请公布号 US6657324(B1) 申请公布日期 2003.12.02
申请号 US20010959449 申请日期 2001.10.25
申请人 NEC CORPORATION 发明人 MARUMOTO TSUNEHISA
分类号 H01H11/04;B62D57/00;B81B3/00;B81B5/00;H01H1/20;H01H59/00;H01P1/12;(IPC1-7):H02B1/24;H01P1/10;H05K3/10;H01L21/311 主分类号 H01H11/04
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