| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high-precision focus measurement without depending on the surface condition of an object. SOLUTION: A measurement beam is projected to the surface of an object. A measurement result of the measurement beam reflected on the surface and a prescribed relational expression are used to measure the object position information in a normal direction on the surface. Based on the condition of a measured region on the surface of the object to which the measurement beam is projected, the prescribed relational expression is calibrated, as calibration processes S4-S7. COPYRIGHT: (C)2004,JPO
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