| 摘要 |
PROBLEM TO BE SOLVED: To provide a new structure for a flow sensor which facilitates measurement of a minute differential pressure when a minute flow rate is measured, and has a higher withstand pressure. SOLUTION: A chamber 20 is partitioned into a primary chamber 21 and a secondary chamber 25 by counterposing two diaphragms 31, 32 in the chamber 20. The flow rate of a fluid is detected by flowing the fluid caused to have a differential pressure from the primary chamber to the secondary chamber via a bypass passage 35 having an orifice portion 40, and detecting as a difference of displacements, a load produced by a pressure variation of the fluid which the first and second diaphragms receive by a load difference sensor 50 arranged touching between the first diaphragm and the second diaphragm. The flow sensor is provided with displacement limiting members 61, 62 for the diaphragms or load difference sensor which prevent the displacement by the pressure variation of the fluid which the first and second diaphragms receive from becoming a predetermined value or higher. COPYRIGHT: (C)2004,JPO
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