| 摘要 |
PROBLEM TO BE SOLVED: To provide a send stage for a device of exposing the original disk of an optical disk, wherein highly precise sending is achieved, and also to provide a control device thereof. SOLUTION: A support 89, separate in the direction perpendicular to the sending direction, is mounted on a base 90 on a servo-mounter with air pressure. One end of the support is fixed to the base 90, and a moving body 13 is fixed to the other end via a roller bearing 1 in which a spherical body or a cylindrical roller or the like is disposed in the rolling direction at the upper end part. A turntable 18 is fixed to the top of the moving body 13, and also an air spindle 19, receiving compressed air supplied from the outside which is not indicated and floating with the static pressure with the received compressed air, is fixed to the moving body. Further, an optical rotary encoder (1) 21 is fixed to the air spindle 19 via a rotation driving motor 20. The optical rotary encoder consists of A-phase and B-phase pulses whose output generally divides one round into thousands of equal portions and a Z-phase pulse generated once a round, and is rotatable with current-carry signals to the rotation driving motor 20 from the outside which is not indicated. COPYRIGHT: (C)2004,JPO
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