| 摘要 |
The invention relates to a microscope arrangement (1) for analysing a substrate (2). Said arrangement comprises a microscope (20), an illumination device (12), preferably an inspection glass (10), a holding element (30), a substrate holder (40) and a rotating device (71) and/or a tilting device (72). The substrate holder (40) can be displaced between at least two positions located in the viewing regions (11, 21) of the microscope (20) or the inspection glass (10) respectively. The substrate (2) can first be subjected to an oblique light control by means of the rotating device and/or the tilting device (71, 72), in order to detect defective positions. A high-resolution inspection can then be carried out by means of the microscope (20) in order to classify the defect found in the detected defective position, without requiring the substrate (2) to be removed from the substrate holder (40). |
