摘要 |
To provide a suitable material having improved impermeability to liquid chemicals and cracking resistance while retaining excellent heat resistance and processability inherent in FEP-based fluororesins, a molded article of which is useful in the field of semiconductor production apparatus and the like. The present invention provides a fluorine-containing resin material comprising a fluorine-containing copolymer comprising 85 to 95.5% by mole of a repeating unit derived from tetrafluoroethylene, 5 to 10% by mole of a repeating unit derived from hexafluoropropylene and 0.1 to 5% by mole of a repeating unit derived from at least one higher perfluoro(vinyl ether) represented by the formula (1): CF2=CF-O-Rf<1 > (1)wherein Rf<1 >is a perfluoroalkyl group having 5 to 10 carbon atoms or a perfluoro(alkoxy alkyl) group having 4 to 17 carbon atoms, and molded article thereof.
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