| 摘要 |
<p>A polishing pad made of a non-foamed material has surface roughness Ra in the range of 0.1-10 micrometers, or preferably 0.5-1.5 micrometers and variations in thickness less than 50 micrometers, or preferably less than 30 micrometers. Its shore D hardness is greater than 60 degrees, or preferably 68 degrees. Its compressibility is less than 3%, or preferably less than 1% and its elasticity is greater than 30%, or preferably 50%, as measured by specified methods. Grooves may be formed over 30%-70%, preferably 40%-60% of the total area of the polishing surface. When the polishing surface is subjected to a dressing process, its surface roughness Ra is restored to 0.1-10 micrometers, or preferably 0.5-1.5 micrometers.</p> |
