摘要 |
There is provided an image pickup apparatus in which the photoelectric conversion area (22), for converting light into charge, is protected by a passivation layer (30;28) and a microlens (27), for focussing incident light onto the photoelectric conversion area, is formed on the planarized surface of the passivation layer. The passivation layer (30;28) may be of an SiON-based or SiO-based material or other inorganic material that is planarized by chemical mechanical polishing. A color filter may be provided on the light incident side of the microlens. This apparatus may further include imaging optics (1001-1003) and a signal processing circuit (1005). <IMAGE> |