发明名称 Displacement information detecting apparatus
摘要 This invention relates to a displacement information detecting apparatus which has a light beam illuminating system for making a light beam enter a first area of the grating portion of a relatively displaceable scale member provided with a grating portion having a wavefront dividing function in the direction of grating arrangement, a reflecting member for reflecting the light beam having emerged from the first area into which the light beam has been made to enter by the light beam illuminating system to enter a second area which is in a direction substantially perpendicular to the grating arrangement relative to the first area, and a plurality of light receiving portions for receiving a plurality of light beams created by the wavefront dividing function in the second area into which the light beam has been made to enter by the reflecting member, a signal corresponding to the displacement relative to the scale member being provided by the light reception by each of the light receiving portions.
申请公布号 US6654128(B2) 申请公布日期 2003.11.25
申请号 US19980103581 申请日期 1998.06.24
申请人 CANON KABUSHIKI KAISHA 发明人 TAKAYAMA MANABU;IGAKI MASAHIKO
分类号 G01D5/38;(IPC1-7):G01B9/02 主分类号 G01D5/38
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