发明名称 Solid state imaging device, manufacturing method thereof, and solid state imaging apparatus
摘要 A sole state imaging device includes a photodetection diode and an insulated gate field effect transistor provided adjacent to the photodetection diode for optical signal detection. In a method of making the device, a carrier pocket is formed in a second well region, and an element isolation insulating film is formed to isolate adjacent unit pixels from each other. In addition, an element isolation region of an opposite conductivity type is formed to isolate a second semiconductor layer of one conductivity type in such a way as to include the lower surface of the element isolation insulating film and reach a first semiconductor layer.
申请公布号 US6653164(B2) 申请公布日期 2003.11.25
申请号 US20020290363 申请日期 2002.11.08
申请人 INNOTECH CORPROATION 发明人 MIIDA TAKASHI
分类号 H01L27/146;H01L31/00;(IPC1-7):H01L21/00 主分类号 H01L27/146
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