发明名称 |
Cylinder, load port using it, and production system |
摘要 |
A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one end of the piston room; a first spring member 15 to separate the spring receiving member from the piston; a stopper 8 formed on piston rod 3 to limit spring receiving member 14 from moving in the opposite direction to piston 4, a hollow 9 formed on the periphery of piston rod 3 at farther position from piston 4 than stopper 8; and a stop pin 11 installed in the cylinder tube to be pressed in the direction of hollow 9 by a second spring member 12 to engage with hollow 9, wherein the movable length of piston rod 9 while stop pin 11 is engaged with hollow 9 is larger than movable distance of spring receiving member 14 from the piston. A load port and a production system of this invention are constructed using the cylinder.
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申请公布号 |
US6652212(B2) |
申请公布日期 |
2003.11.25 |
申请号 |
US20010999464 |
申请日期 |
2001.10.31 |
申请人 |
CKD CORPORATION;SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.;RORZE CORPORATION |
发明人 |
KIMOTO SHINYO;TOKUNAGA KENJI;SAKATA KATSUNORI;KAJITA NORIO |
分类号 |
F15B15/26;H01L21/677;(IPC1-7):H01J5/02;E05C5/02 |
主分类号 |
F15B15/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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