| 摘要 |
PROBLEM TO BE SOLVED: To realize a positioning device which reduces an offset error, a span error, and a linearity error occurred in an analog electric circuit, and which outputs a high-precision positioning complete signal. SOLUTION: The positioning device, which positions an object by a position feedback control part based on deviation between a position command value and a position detected value of the object, and which informs positioning complete by the positioning complete signal when the deviation converges under a prescribed steady completion zone, creates a correction table, which indicates relation between the position command value and the position detected value at completion state of the positioning, in advance, stores this correction table, and corrects the position command value using the correction table when the positioning is operated. COPYRIGHT: (C)2004,JPO
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