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发明名称
Herstellungsverfahren für Halbleiterbauelement mit Kondensator von hoher dielektrischer Konstante
摘要
申请公布号
DE69433244(D1)
申请公布日期
2003.11.20
申请号
DE1994633244
申请日期
1994.08.03
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
ARITA, KOJI;FUJII, EIJI;SHIMADA, YASUHIRO;UEMOTO, YASUHIRO;INOUE, ATSUO;NASU, TORU;MATSUDA, AKIHIRO;NAGANO, YOSHIHISA;MATSUURA, TAKETOSHI;OTSUKI, TATSUO
分类号
H01L21/02;H01L21/8242;H01L21/8246;H01L27/115;(IPC1-7):H01L27/115;H01L29/92;H01L21/320
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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