发明名称 LENS CONSISTING OF A CRYSTALLINE MATERIAL
摘要 The invention relates to a method for producing an optical blank (1) consisting of a crystalline material, as a preliminary stage for the production of a lens or a lens element for an objective, especially a projection objective for a microlithography projection exposure installation. According to the inventive method, the orientation of a first crystal direction (3) defined inside the crystalline structure is determined first of all. The optical blank (1) is then worked in such a way that the first crystal direction (3) is essentially perpendicular to an optical raw surface (7) of the optical blank (1). A marking is then applied to the optical blank (1) or to a holding mount of the optical blank (1), said marking being related to a second crystal direction (11) in a defined manner. The second crystal direction forms an angle different from zero with the first crystal direction (3).
申请公布号 WO03096124(A1) 申请公布日期 2003.11.20
申请号 WO2002EP12690 申请日期 2002.11.13
申请人 CARL ZEISS SMT AG;ENKISCH, BIRGIT;ENKISCH, HARTMUT;GRUNER, TORALF 发明人 ENKISCH, BIRGIT;ENKISCH, HARTMUT;GRUNER, TORALF
分类号 G02B17/08;B24B49/00;G03F7/20;H01L21/027 主分类号 G02B17/08
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