发明名称 |
LENS CONSISTING OF A CRYSTALLINE MATERIAL |
摘要 |
The invention relates to a method for producing an optical blank (1) consisting of a crystalline material, as a preliminary stage for the production of a lens or a lens element for an objective, especially a projection objective for a microlithography projection exposure installation. According to the inventive method, the orientation of a first crystal direction (3) defined inside the crystalline structure is determined first of all. The optical blank (1) is then worked in such a way that the first crystal direction (3) is essentially perpendicular to an optical raw surface (7) of the optical blank (1). A marking is then applied to the optical blank (1) or to a holding mount of the optical blank (1), said marking being related to a second crystal direction (11) in a defined manner. The second crystal direction forms an angle different from zero with the first crystal direction (3). |
申请公布号 |
WO03096124(A1) |
申请公布日期 |
2003.11.20 |
申请号 |
WO2002EP12690 |
申请日期 |
2002.11.13 |
申请人 |
CARL ZEISS SMT AG;ENKISCH, BIRGIT;ENKISCH, HARTMUT;GRUNER, TORALF |
发明人 |
ENKISCH, BIRGIT;ENKISCH, HARTMUT;GRUNER, TORALF |
分类号 |
G02B17/08;B24B49/00;G03F7/20;H01L21/027 |
主分类号 |
G02B17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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