| 发明名称 |
Verfahren und Vorrichtung zur Druckmessung in einer CVD/CVI-Kammer |
| 摘要 |
An apparatus to determine the pressure within the furnace during thermal gradient forced flow processes as well as other CVI/CVD processes is disclosed. Further, a method to measure the pressure is also described. <IMAGE> |
| 申请公布号 |
DE60005888(D1) |
申请公布日期 |
2003.11.20 |
| 申请号 |
DE2000605888 |
申请日期 |
2000.06.02 |
| 申请人 |
GOODRICH CORP., CHARLOTTE |
发明人 |
FIALA, ROBERT A.;ROSS, ROGER A.;TRUJILLO, PATRICK C. |
| 分类号 |
C23C16/04;C23C16/52;F27D19/00;F27D21/00;F27D99/00;(IPC1-7):C23C16/04 |
主分类号 |
C23C16/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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