| 摘要 |
<p>Apparatus for optical assessment of a sample (22) includes a radiation source (24), adapted to generate a beam of coherent radiation, and traveling lens optics (26, 28), adapted to focus the beam so as to generate first and second spots (48, 50) on a surface of the sample and to scan the spots together over the surface. Collection optics (46, 52, 54) are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes. A detector detects a change in the pattern of the interference fringes as the spots are scanned over the surface.</p> |
