| 摘要 |
For each of colored resists, a resist coating step of coating a washed substrate with the colored resist, a reduced-pressure drying and temporary baking step of evaporating solvent contained in the colored resist, an exposing step of printing a pattern in the colored resist, a developing the printed pattern and a photo-curing and temporary post-baking step of hardening a surface portion of the resist to a hardness level, in which there is no defect of the printed colored resist pattern occurs in a coating step and a developing step, which are performed later, are repeated. In forming a last colored resist, a normal baking step of simultaneously hardening all of the coated colored resist patterns is performed, instead of the photo-curing and temporary post-baking step.
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