| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of inspecting an actuator device and a method of inspecting an inkjet recording head capable of discriminating comparatively accurately a displacement characteristic of a diaphragm driven by a piezoelectric element. <P>SOLUTION: The displacement characteristic is discriminated by performing at least a driving/measuring process for measuring an electrostatic capacitance of a piezoelectric material layer by applying a predetermined voltage to the piezoelectric element under condition that the piezoelectric element can be driven. <P>COPYRIGHT: (C)2004,JPO</p> |
