| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump and an operation method of a micropump for simply controlling a flow rate. SOLUTION: In this micropump equipped with the heating element, substantial pulsed operation of the heating element is performed with a control device. The heating element is alternately changed between a heating phase T2 and a still phase T1, and the accurate control of the flow rate is performed based on the pulsed operation. By this control device, the flow rate is constantly maintained over long days, and the flow rate is rapidly and accurately varied. COPYRIGHT: (C)2004,JPO
|
