| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum exhaust device with the usage of a turbo molecular pump reducing influence of vibration of the turbo molecular pump to the outside. SOLUTION: A friction damping mechanism 34 is arranged between the turbo molecular pump 30 and a vacuum chamber. As the friction damping mechanism 34, a vacuum casing 31 of the turbo molecular pump 30 and a vacuum flange 32 connected to the vacuum chamber are fastened by a bellows 33 having a small spring constant. Thus, damping with respect to relative movements between the vacuum flange 32 and the vacuum casing 32 is actuated. COPYRIGHT: (C)2004,JPO
|
