| 摘要 |
PROBLEM TO BE SOLVED: To enable the deposition of clean, uniform and dense films on optical fibers, etc., coated with resins which is heretofore difficult. SOLUTION: The deposition method is for depositing various kinds of the films, such as oxidized films and metallic films, by vacuum vapor deposition on the optical fibers or optical components having the optical fibers, in which the optical fibers, etc., are placed for a prescribed time in a vacuum chamber kept at a prescribed temperature and under a prescribed pressure and the degassing of the optical fibers is performed and thereafter the optical fibers, etc., are transferred into another vacuum chamber and are subjected to deposition by vacuum vapor deposition. The optical fibers are formed by depositing the Ti films of 10 to 50 nm by vacuum vapor deposition thereon within the vacuum chamber and depositing the Ni films of a thickness 10 to 50 nm by vacuum vapor depositing thereon. COPYRIGHT: (C)2004,JPO
|
