APPARATUS FOR PLASMA SURFACE TREATMENT

摘要

PURPOSE: An apparatus for plasma surface treatment is provided to be capable of locally carrying out a surface treatment at an aiming region alone regardless of the shape of a treatment object and increasing the speed of the surface treatment. CONSTITUTION: An apparatus for plasma surface treatment is provided with a laser generation part(1) for generating laser beam(2) having a predetermined power more than a plasma generating critical value and a focus forming part(4) for forming laser focus(6) by condensing the laser beam. The apparatus further includes a plurality of gas supply parts(22,23,24) for supplying plasma excitement gas and reaction gas to the laser focus. Preferably, the laser beam with a continuous wave is used and the laser power is more than 100 Watt.