CHEMICAL SUPPLY APPARATUS

摘要

PURPOSE: A chemical supply apparatus is provided to be capable of continuously supplying chemical to a process apparatus without the waste of refilling time, recycling the chemical used at the process apparatus, quickly and exactly controlling the temperature of the chemical. CONSTITUTION: A chemical supply apparatus is provided with the first tank(110) for mixing more than two chemicals supplied from each supply tub, a circulation part for circulating the chemicals of the first tank so as to uniformly mix the chemicals, and the second tank(120) for storing the mixed chemical solution supplied from the first tank. The chemical supply apparatus further includes a distributing part(170) for supplying the mixed chemical solution to each process apparatus and a heating part(130) installed at a supply line connected with the second tank and the distributing part for heating the mixed chemical solution.