| 摘要 |
PROBLEM TO BE SOLVED: To obtain a measuring instrument capable of highly efficiently measuring a surface shape during working even at a middle working stage before the stage where the surface shape measuring becomes possible with an interferometer, in a aspherical working. SOLUTION: In the surface shape measurement of a Shack-Hartman method, measurement is performed by sweeping a microlens array and a sensor (CCD: charge coupled device) in a surface normal to a measurement optical axis. The number of divisions of an inspected surface, a weak point of the Shack- Hartman method, is improved, and a dynamic range can be ensured for measurement. COPYRIGHT: (C)2004,JPO
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