| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the manufacturing cost of a substrate device manufactured by sticking two sheets of substrates to each other (for example, a microlens array or the like). <P>SOLUTION: The first alignment marks (204A), (204A') and the second alignment marks (204B), (204B') with a shape different from that of the first alignment marks are respectively formed on first and second substrates (200), (200'). Moreover, in sticking the first and second substrates to each other, both substrates are positioned in such a way that the position of the first alignment mark on the first substrate corresponds to the position of the second alignment mark on the second substrate and further the position of the second alignment mark on the first substrate corresponds to the position of the first alignment mark on the second substrate. <P>COPYRIGHT: (C)2004,JPO |
