| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing the antireflective film which has high transmissivity to infrared light, an antireflective film which is obtained by the method, a spatial optical modulating element which has the antireflective film and employs the infrared light as readout light, and a spatial optical modulating device equipped with the element. <P>SOLUTION: The method of manufacturing an antireflective film (transparent electrode) 20 having an antireflective function for light to be used includes a laminated body forming process of forming, on a transparent substrate 26, a laminated body 21 including a transparent conductive layer 22 which contains metal oxide and has light transmissivity and conductivity and at least one electric layer 24 which has light transmissivity and a refractive index different from that of the transparent conductive layer and is arranged adjacently to the transparent conductive layer and a heat treatment process of heat-treating the laminated body obtained in the laminated body forming process while holding it gas containing an oxidizer at a specified heat-treatment temperature of ≥300°C. <P>COPYRIGHT: (C)2004,JPO |
